jëfandikoo plasma Cleaners

Masin yiy raxas/grave plasma dañuy defar plasma ci def ñaari electrode ci biir récipient buñu tëj ngir defar ci champ électrik. Pompu vide dañu koy jëfandikoo ngir tëye benn niveau vide. Lu gaz bi di gëna néew doole, diggante molecule yi ak dem bi ak dikk bi molecule yi wala ion yi di def itam dafay gëna yokk. Su amee doole ci champ électrik bi, ion yooyu dañuy mbëkkante daal di nekk plasma. Ion yooyu dañuy reaktif lool, am doole ju doy ngir dog daanaka bépp lëkkaloo chimik, di indi reaction chimik ci bépp surface buñu exposé. Plasma gaz bu nekk amna màndarga chimik bu wuute. Ci misaal, plasma oxygen dafay oxide bu baax, mën na oxide photoresist ngir génne gaz, suko defee mu mëna setal. Plasma gaz corrosif amna anisotropie bu baax, bu méngoo ak li ñuy laaj ci gravure. Pajum plasma dafay defar melax, moo tax ñu tuddee ko decharge melax.
Xeetu setal plasma mingi njëkka aju ci "aktiwite" particule yi am ci plasma bi ngir dindi ay tach ci kaw suuf si. Ci wàllu mekaniismu reaksioŋ, setal plasma dafay faral di am anam yii: gaz inorganik yi dañu leen di yëngal ñu nekk plasma; substance gaz yi dañuy xëcci ci kaw surface bu dëgër bi; grupu adsorbé yi dañuy jaxasoo ak molecule yi ci kaw surface bu dëgër bi ngir sos molecule produit; molecule produit yi dañuy seey nekk fase gaz; ba noppi dindi residu yi ci kaw suuf si.

Li gëna am solo ci xaralay setal plasma mooy mën na setal bépp xeetu substrat, lu ci melni weñ, semi-konduktër, oksid, ak yeneen mbir yu melni polipropileen, poliester, poliimid, chlorure polivinil, epoxy, ba ci politetrafluoroethylene. Mën na setal surface bi yépp ak yenn barab yuñ tànn, ak itam jumtukaay yu jaffe.